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trimethylsilyl chloride : ウィキペディア英語版
trimethylsilyl chloride

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Trimethylsilyl chloride, also known as chlorotrimethylsilane is an organosilicon compound (silyl halide), with the formula (CH3)3SiCl, often abbreviated Me3SiCl or TMSCl. It is a colourless volatile liquid that is stable in the absence of water. It is widely used in organic chemistry.
==Preparation==
TMSCl is prepared on a large scale by the Direct process, the reaction of methyl chloride with a silicon-copper alloy. The principal target of this process is dimethyldichlorosilane, but substantial amounts of the trimethyl and monomethyl products are also obtained. The relevant reactions are (Me = CH3):
:x MeCl + Si → Me3SiCl, Me2SiCl2, MeSiCl3, other products
Typically about 2-4% or the product stream is the monochloride, which forms an azeotrope with MeSiCl3.

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